| 摘要 |
PROBLEM TO BE SOLVED: To prevent a bonding defect and prevent the clogging of a capillary, by detecting the bonding detect, based on whether the absolute value of the output voltage of a torch power source to apply high voltages is over the preset value or not. SOLUTION: In the case of forming a bump by ball bonding method, the bonding defect is detected, based on whether the absolute vale of the output voltage of a torch power source 1 to apply high voltage is over the preset value or not. Fox example, if a high level of output can be gotten from the comparison circuit by comparing the output voltage value of the torch power source 1 divided with resistors with the judgment criteria voltage value corrected by the value of the resistance by means of a comparison circuit 2, it is judged that it was a misjudge. Then, an RS flip-flop 3 is set with the output of the comparison circuit 2, and is reset by the rest signal from a computer for control after input of data to indicate that it is faulty into the computer of control. |
