| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveying device in which a deflection of a substrate is suppressed and nonuniformity in drying the surface of a substrate is prevented. SOLUTION: When a rectangular substrate 13 is conveyed, an air cylinder 7 for attitude control is driven so that the entire face of the rectangular substrate 13 is changed from a horizontal attitude to a predetermined inclined attitude together with a first substrate supporting member 12 and a second substrate supporting member 20. Consequently, the horizontal component in the deflection direction is shortened so that the deflection of the rectangular substrate 13 is suppressed. A breakage due to over-deflection of the rectangular substrate 13 can be suppressed accordingly. Since a process liquid supplying member 22 is disposed along the upper periphery of the rectangular substrate 13 in the evenly inclined attitude and a process liquid is supplied from the process liquid supplying member 22 to the upper periphery of the rectangular substrate 13, the process liquid is not stopped in the way and is discharged from the lower periphery of the inclined attitude. The self weight of the process liquid to the rectangular substrate 13 is reduced so that the deflection of the rectangular substrate 13 is suppressed. The breakage due to the over-deflection of the rectangular substrate 13 can be accordingly suppressed. |
