| 摘要 |
<p>PROBLEM TO BE SOLVED: To make deterioration of an insulating layer hardly occur by making an upper part electrode have three layer structure by sandwiching an interlayer between an interface layer and a surface layer. SOLUTION: An upper part electrode 11 comprises three-layer thin film consisting of an interface layer 16, an interlayer 17, and a surface layer 18 and the sublimation enthalpy of the material of the layer 17 is set to be higher than that of the material of the layer 18 and to be lower than that of the material of the layer 16. Consequently, a thin film electron source which is not deteriorated even after a long time operation can be materialized. Further, by optimizing the thickness of the layer 16, high emission electric current density can be stably obtained. Moreover, in the case the demand of conductivity to the electrode 11 is moderate, the electrode 11 is constituted of two layers of the layer 16 and the layer 17 and Pt is used as the material of the layer 17 and a material having higher sublimation enthalpy than Pt is used for the layer 16, so that the same effect can be provided. An image display apparatus with high brightness and a long life and a high speed electron beam drawing apparatus can be obtained by employing this thin film electron source for the display apparatus and the electron beam drawing apparatus.</p> |
