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发明名称
APPARATUS FOR WAFER TREATMENT AND METHOD THEREFOR
摘要
申请公布号
JPH09321020(A)
申请公布日期
1997.12.12
申请号
JP19960129743
申请日期
1996.05.24
申请人
MITSUBISHI ELECTRIC CORP
发明人
SAKAMOTO TATSUYA
分类号
H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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