HEAT TREATMENT EQUIPMENT,申请号JP19960160827-传众专利搜索

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发明名称	HEAT TREATMENT EQUIPMENT
摘要
申请公布号	JPH09320974(A)	申请公布日期	1997.12.12
申请号	JP19960160827	申请日期	1996.05.31
申请人	TOKYO ELECTRON LTD	发明人	KIMURA HIDETOSHI;SEGAWA SUMIE
分类号	H01L21/22;H01L21/31;H01L21/324;(IPC1-7):H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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