| 摘要 |
PROBLEM TO BE SOLVED: To provide a sealing structure for sensor in which the sealing performance is not deteriorated even under high temperature nor the detection accuracy is deteriorated by discharge of fluorine gas, or the like. SOLUTION: In a sensor unit 50, a detection element 2 is arranged on the inside of a tubular casing 1 having an opening 1e at one end thereof and lead wires 4, 9 for taking out the output from the detection element 2 are led out from the opening 1e to the outside. A sealing member 10 is arranged on the inner end side at the opening 1e of the casing 1 to seal the lead wires 4, 9 and the inner surface of the casing 1 thus forming a sealing structure. The sealing member 10 has a first part 11 of silicon rubber including the end face 11a facing the inside of the casing 1 and a second part 12 of fluororubber including the end face 12a on the opening 1e side. |
