| 摘要 |
PROBLEM TO BE SOLVED: To shorten the conjugate length of an optical system and to form the device to be compact by constituting a tilt and shift optical system of an image-formation lens, whose optical axis is at a position deviated from a line passing the center of a micromirror array and perpendicular to a base plate surface. SOLUTION: Recording light L emitted from a light source 11 is turned into parallel beams by a condensing lens 12, and a mirror array device 13 is arranged at a position on which the recording light L is made incident. The device 13 has plural micromirrors arranged in a two-dimensional array state on a silicon base plane. In order to selectively reflect the recording light L in a direction where it is made incident on a photosensitive material 10 or a direction where it is not made incident thereon, the micromirror is formed to selectively take a direction inclined by an angleθto the base plate surface of the device 13 and a direction inclined by an angle -θ. The image-formation lens 14 forms the tilt and shift optical system whose optical axis is at the position deviated from the line passing the center of the micromirror array and perpendicular to the base plate surface.
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