| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer laser equipment which prevents seals from being damaged due to the reduction of a quantity of magnetic fluid used for sealing the rotation axis part. SOLUTION: An excimer laser equipment is composed of a fan 3 in the laser chamber, magnetic fluid seals 10 and 11 which seal between the laser chamber inner side and outer side on the outer circumference of the rotation axis 3 of the fan 3, a magnetic fluid supply means 50 which supplies magnetic fluid 33 to the magnetic fluid seals 10 and 11 and an open/close means composed of halogen resistant material to open/close the magnetic fluid supply means 50. The magnetic fluid seals 10 and 11 are provided with at least two pole plates 32, which are arranged separately in the axis direction on the outer circumference of the rotation axis of the fan 3, a cylindrical magnet 31 arranged between the adjacent pole plates 32 and 32 and the magnetic fluid 33 applied in a first space 63 between the inner face of each pole plate 32 and the outer circumference face of the rotation axis. A through hole 32 or a through hole 31a which is a part of a supply pipe 53, which supplies the magnetic fluid 33 to the first space 63, is provided on the pole plate 32 or the magnet 31, respectively. |
