| 摘要 |
PROBLEM TO BE SOLVED: To obtain a grinding speed by using abrasive containing a specific weight part of alminium oxide and/or silicon oxide and a specific weight part of oxide cesium and by specifying a particle diameter. SOLUTION: This abrasive contains alminium oxide particle powder or silicon oxide particle powder which has a means particle diameter (a means secondary particle diameter) being less than about 2μm, preferably about 0.2μm - about 1.0μm measured by a light scattering method (micro-track) and cerium oxide having about 5 weight part - about 25 weight part, preferably about 8 weight part - about 20 weight part per base metal oxide 100 weight part in terms of Ce. Additionally BET specific area of the abrasive being about 40 - about 150m<2> /g, preferably about 40 - about 100m<2> /g and more preferably about 40 - about 70m<2> /g is recommended. By the means high grinding performance is generated without using alkaline metal such as NaOH, KOH and so on together and the abrasive which has few alpha radiation causing defect generation of scratch or orange beer or generation of soft error can be obtained. |
