METAL PARTICLE SENSOR AND PARTICLE SIZE MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a metal particle sensor for detecting the metal particle distribution accurately over a wide range of particle size and a particle size measuring method therefor. SOLUTION: The sensor comprises an electrode section 20 having a pair of electrodes to be applied with a predetermined voltage arranged in an insulating medium and pulsating a short circuit current being generated between the electrodes by metal particles mixed in the insulating medium, a signal processing section 30 for detecting the peak voltage of the pulse signal, and a data processing section 40 for calculating the particle size and the concentration of the metal particle in the insulating medium based on the peak voltage value and the count of the pulse signals. The electrode section 20 is provided with a plurality of pairs of electrode of different distance in order to shift the range of particle size to be measured. An interdigital electrode may be employed as the plurality of electrodes.