| 摘要 |
PROBLEM TO BE SOLVED: To improve, without affecting a normal measurement, an excessive load withstanding characteristics of a 6-axial force sensor of the type wherein a shearing strain gauge is mounted on an L-shape leg. SOLUTION: Supporting areas 313, 314 and 315 included in structure parts 310 and 311, of thick wall, of a sensor body are, through step parts 313a, 314a and 315a, respectively, connected to an L-shape leg 312 of rather thin wall. To the leg 312, recessed parts 303 and 304 are provided, and a shearing strain gauge (not shown in the figure) is attached to each bottom part. Around the leg 312, with the use of wire cut electric discharge machining technique, holds Q1-Q6 and slit means 300, 301 and 302 connected to them are formed. When a farce sensor is applied with an excessive load, choking occurs at either part of slits P1→P2, P3→P4, etc., contained in the slit means 300, 301 and 302, following elastic deformation of the L-shape leg 312, and even a load larger than that is applied to the force sensor, a load on the L-shape leg 312 does not increase mostly, thus, a mechanism part of the force sensor is protected from an excessive load.
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