发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To suppress the power consumption of a semiconductor device by restricting the OFF-current of a field-effect transistor to effectively lower its threshold voltage. SOLUTION: The gate is composed of a low-concn. polysilicon semiconductor layer 13 having impurity concn. of 1×10<17> -9×10<18> cm<-3> and metal layer 6 of Ti, Mo, W, TiSi, MoSi or WSi to form a Schottky barrier between both. By utilizing the ripple overshoot of a voltage applied to the gate of the field-effect transistor and the Schottky barrier, charges are accumulated between the semiconductor layer 13 and a metal layer 6 to provide a more intensive OFF-state while ions are implanted in other than working layers to avoid damaging the layers of the semiconductor device.
申请公布号 JPH09321322(A) 申请公布日期 1997.12.12
申请号 JP19960135367 申请日期 1996.05.29
申请人 SANYO ELECTRIC CO LTD 发明人 FUJIWARA HIDEAKI
分类号 G02F1/136;G02F1/1368;H01L21/265;H01L21/338;H01L21/8238;H01L27/092;H01L29/47;H01L29/78;H01L29/812;H01L29/872;(IPC1-7):H01L29/872;H01L21/823 主分类号 G02F1/136
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