RESISTOR AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To provide a resistor having a low sheet resistance value and less changes in resistance due to heat treatment, by providing a resistor film of Cu-Ni binary alloy on the surface of an insulating base, using an electroless plating solution made of specified basic components, and providing external connection terminals on a pair of facing end portions of the resistor film. SOLUTION: After the surface of an insulating base 1 has been roughened by chemical etching processing, activation is performed to form a catalyzed activated layer on the surface of the insulating base 1. Then, the insulating base 1 is impregnated with an electroless plating solution, thus forming a Cu-Ni alloy film 2 on the surface of the insulating base 1. In this case, the electroless plating solution contains Cu<2+> and Ni<2+> , uses a complexing agent having complex-forming ability with Cu<2+> and relatively small complex-forming ability with Ni<2+> , and is mixed with a reducing agent having catalyzed activation property, with respect to reduction precipitation of copper. Using this plating solution, the Cu-Ni alloy film 2 is precipitated to such a thickness, that a desired sheet resistance value is obtained on the surface of the insulating base 1.