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发明名称
SCANNING PROBE MICROSCOPE
摘要
申请公布号
JPH09318637(A)
申请公布日期
1997.12.12
申请号
JP19960133512
申请日期
1996.05.28
申请人
OLYMPUS OPTICAL CO LTD
发明人
SAKAI NOBUAKI
分类号
G01B21/30;G01N37/00;G01Q30/04;G01Q60/32;G01Q60/38;G01Q90/00;(IPC1-7):G01N37/00
主分类号
G01B21/30
代理机构
代理人
主权项
地址
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