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发明名称
WASHING APPARATUS FOR SEMICONDUCTOR
摘要
申请公布号
JPH09321015(A)
申请公布日期
1997.12.12
申请号
JP19960134746
申请日期
1996.05.29
申请人
MIYAZAKI OKI ELECTRIC CO LTD;OKI ELECTRIC IND CO LTD
发明人
NAGATOMO HISANOBU;ISHIZAKI MASAHIRO
分类号
B08B3/04;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B3/04
代理机构
代理人
主权项
地址
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