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发明名称
PLASMA-TREATING METHOD
摘要
申请公布号
JPH09320797(A)
申请公布日期
1997.12.12
申请号
JP19960133037
申请日期
1996.05.28
申请人
NIPPON SHEET GLASS CO LTD;SUMITOMO HEAVY IND LTD
发明人
WADA SHUNJI;TANAKA MASARU
分类号
H05H1/46;C23C14/56;C23C16/50;(IPC1-7):H05H1/46
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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