发明名称 Compensation method for time delay in interferometer measurement and reference signals
摘要 The method involves measuring the time taken to transmit a signal over the interferometer measurement or reference signal circuit, for a specific clock period interval. An adjustment is then made to the time measured, relative to the known time delay. This is to compensate for the age of the data by subtracting the known time delay from the time measured, in order to make the adjusted time for the specific interval available. The adjusted time is then converted in to a phase measurement. This is then converted into a dynamic interferometric position measurement, to provide a measurement independent of any speed of movement of the object, the position of which is measured and which has the reduced data age difference between the signal circuits which provide the measurement
申请公布号 DE19723448(A1) 申请公布日期 1997.12.11
申请号 DE19971023448 申请日期 1997.06.04
申请人 ZYGO CORP., MIDDLEFIELD, CONN., US 发明人 DEMAREST, FRANK C., MIDDLETOWN, CONN., US
分类号 G01B9/02;G01B11/00;G01J3/45;G01J9/02;(IPC1-7):G01J9/04 主分类号 G01B9/02
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