| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain an analyzer by which a two-dimensional image and analytical data can be measured and observed simultaneously by a method wherein a beam of light, a radiation or the like which is emitted by an object to be measured is imaged as the two-dimensional image by an imaging means so as to be analyzed by an analytical means via an opening in the imaging means. SOLUTION: An object 2 to be measured is set on an X-Y stage 71, a beam of light which is emitted by it is imaged on an imaging part 33 at a CCD via an optical lens system 41, the image of the beam of light is converted photoelectrically, and a video signal is amplified by a CCD drive circuit 32 so as to be output. A part of the beam of imaged light is passed through an opening 34 so as to be incident on a spectroscope 51 as a beam of sampling light for analysis, it is spectrally diffracted into wavelength bands, and signals in respective wavelengths are detected by a detector 52. The signals are input to a data processing circuit 53, an analytical data signal is output, and video signal and the analytical data are input to a signal superposition circuit 61 together with a marker signal so as to be superposed and input to a monitor 62. The monitor 62 displays a two-dimensional image, analytical data and its position marker, and the object 2 to be measured can be observed and analyzed precisely.</p> |
