| 发明名称 |
VERTICAL HEAT TREATMENT DEVICE |
| 摘要 |
A vertical heat treatment device with a good uniformity and repeatability. A heater (21) of a heating furnace (2) is at the side of the heat treatment region (13) in a process chamber (1). Therefore the heat temperature distribution in the process chamber (1) is such that the temperature at the heat treatment region (13) is the highest and gradually decreases downward.
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| 申请公布号 |
WO9746842(A1) |
申请公布日期 |
1997.12.11 |
| 申请号 |
WO1996JP02484 |
申请日期 |
1996.08.30 |
| 申请人 |
NIPPON PILLAR PACKING CO., LTD.;YAMADA, YOSHIMITSU;OGINO, KOZO |
发明人 |
YAMADA, YOSHIMITSU;OGINO, KOZO |
| 分类号 |
H05B3/00;C23C16/44;C23C16/46;C30B25/10;C30B31/12;F27B1/09;F27B17/00;H01L21/00;H01L21/205;H01L21/22;H01L21/26;H01L21/31;H01L21/324;(IPC1-7):F27B1/09 |
主分类号 |
H05B3/00 |
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