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发明名称
CMOS-Halbleiterstruktur und Verfahren zur Herstellung derselben
摘要
申请公布号
DE19622415(A1)
申请公布日期
1997.12.11
申请号
DE19961022415
申请日期
1996.06.04
申请人
SIEMENS AG, 80333 MUENCHEN, DE
发明人
KERBER, MARTIN, DR., 81827 MUENCHEN, DE
分类号
H01L21/316;H01L21/768;H01L21/8238;H01L27/092;(IPC1-7):H01L21/318;H01L21/765;H01L21/823
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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