发明名称 |
OPTICAL SCANNING SYSTEM FOR SURFACE INSPECTION |
摘要 |
In an optical scanning system (200) for detecting particles and pattern defects on a sample surface (240), a light beam (238) is focused to an illuminated spot on the surface and the spot is scanned across a scan line. A detector (11b) is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot.
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申请公布号 |
WO9746865(A1) |
申请公布日期 |
1997.12.11 |
申请号 |
WO1997US09650 |
申请日期 |
1997.06.03 |
申请人 |
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发明人 |
LESLIE, BRIAN, C.;NIKOONAHAD, MEHRDAD;WELLS, KEITH, B. |
分类号 |
G01N21/956;G01N21/94;(IPC1-7):G01N21/00 |
主分类号 |
G01N21/956 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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