| 发明名称 |
Scanning electron microscope |
| 摘要 |
<p>A scanned image to be observed or to be recorded is formed by N two-dimensional scanning cycles of an irradiating charged particle or light beam. In order to adjust the averaged irradiation intensity of the sample, the irradiating beam can be blanked during some of the N cycles. <IMAGE></p> |
| 申请公布号 |
EP0811999(A2) |
申请公布日期 |
1997.12.10 |
| 申请号 |
EP19970108821 |
申请日期 |
1997.06.02 |
| 申请人 |
HITACHI, LTD. |
发明人 |
TODOKORO, HIDEO;YAMADA, OSAMU |
| 分类号 |
H01J37/22;H01J37/28;G02B21/00;H01J37/147;(IPC1-7):H01J37/28 |
主分类号 |
H01J37/22 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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