METHOD OF MANUFACTURE FOR FIVE POLE-LOWPASS SUPERDCONDUCTOR

摘要

A fabrication method of planar superconductor five poles low pass filter is provided to improve accuracy of patterns and SN(signal-to-noise) ratio in the range of microwave band. The method comprises the steps of: forming a superconductor film(1) on LaAlO3 substrate(2) using PLD(pulse laser deposition) method; spin-coating a photoresist film on the superconductor film(1) and hard baking; milling the photoresist film and the superconductor film(1) using ECR(electron cyclotron resonance); removing an Ag-paste formed in rear of the substrate(2) and polishing; and forming an input/output terminals(3) in the rear surface of the substrate. Thereby, it is possible to improve accuracy of circuit pattern.