| 摘要 |
PURPOSE:To protect an optical component against contamination so as to prevent it from decreasing in an output and deforming in a mode by a method wherein a drive system of a turbo-blade is installed in a hermetically sealed drive system case independent of a laser gas case, and the laser gas case and the drive system case are isolated from each other by a labyrinth seal. CONSTITUTION:Two metal electrodes 4 and 5 are fitted to the outside of a discharge tube 1, a high frequency voltage is applied between them from a high frequency power source 6, and a high frequency glow discharge is generated inside the discharge tube 1 to start laser excitation. A turbo-blade 16 of a turbo- blower 15 is mounted on a shaft, which is revolved at a high revolution rate by a motor consisting of a rotor 17 and stator 18, where the motor is installed of a drive system case 22 different from a laser gas case 36. And, the laser gas case 36 and the drive system case 22 are isolated from each other by a labyrinth seal 23. By these processes, the device decreases in weight and is miniaturized as a whole, and an optical component is protected against contamination due to an oil component of a lubricating oil, so that a laser output power and a beam characteristic of the device can be prevented from deteriorating. |
