| 摘要 |
PROBLEM TO BE SOLVED: To provide a tilting unit for wire saw which is simple in structure and can simply and quickly perform crystal orientation alignment. SOLUTION: A tilting unit 36 is formed out of a cylindrical body. The cylindrical body is divided into four parts by a face F1 vertical with respect to an axis L and two faces F2 and F3 tilted by predetermined angles with respect to the axis L. The divided bodies 40-46 of the cylindrical body are rotatably connected to each other along respective connection faces F1 -F3 . In tilting operation, angle adjustment in the horizontal direction is performed by the divided body 42 which rotates on the horizontal face F1 and angle adjustment in the vertical direction is performed by the divided bodies 44 and 46 which rotate on the tilted faces F2 and F3 . By combination of the tilts in the two directions, an ingot 32 can be tilted to an optional angle with respect to a wire row face. |
