VCR head drum coated with diamond-like hard carbon films and the method and apparatus for manufacturing the same

摘要

A head drum is coated with double films, each having different characteristics, by forming a first diamond-like hard carbon film of high degree of hardness and then forming a second diamond-like hard carbon film of a lower degree of hardness thereon. The degree of hardness of the second film is lower than that of the first film. The double coating is performed by means of a synthesizing apparatus which comprises a reactor consisting of a power supply electrode, a workpiece support and an annular ground electrode spaced from the stacked head drums by a predetermined distance.