发明名称 Removal of metal contamination
摘要 Generally, and in one form of the invention, a method is presented for the photo-stimulated removal of reacted metal contamination 16 from a surface 11, comprising the steps of: covering the surface with a liquid ambient 14; exciting the reacted metal contamination 16 and/or the liquid ambient 14 by photo-stimulation sufficiently to allow reaction of the reacted metal contaminantion 16 with the liquid ambient 14 to form metal products; and removing the liquid ambient 14 and the metal products from the surface 11. Other methods are also disclosed.
申请公布号 US5695569(A) 申请公布日期 1997.12.09
申请号 US19940192204 申请日期 1994.02.04
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 DOUGLAS, MONTE A.
分类号 C23F4/00;H01L21/00;H01L21/306;(IPC1-7):B08B3/04;B08B7/04 主分类号 C23F4/00
代理机构 代理人
主权项
地址