发明名称 GRINDING DEVICE
摘要 PROBLEM TO BE SOLVED: To attach a grinding pad to a grinding plate in a flat condition, and control the transfer of the heat generated during the grinding to the grinding plate. SOLUTION: A porous ceramic 3 is provided on the surface of a grinding plate 1, and a grinding pad 4 is attached thereto. Bubbles entering between the grinding plate 1 and the grinding pad 4 escape into porosity in the ceramic 3, and the grinding pad 4 can be fitted to the ceramic 3 in a flat condition without mixing the bubbles therein.
申请公布号 JPH09314460(A) 申请公布日期 1997.12.09
申请号 JP19960154834 申请日期 1996.05.27
申请人 TOSHIBA CERAMICS CO LTD 发明人 NAGAHAMA HIROMI;SUZUKI NARIKAZU
分类号 B24B37/12;H01L21/304 主分类号 B24B37/12
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