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发明名称
HEAT-INSULATING DEVICE FOR THIN FILM FORMING MOLECULAR BEAM SOURCE
摘要
申请公布号
JPH09315886(A)
申请公布日期
1997.12.09
申请号
JP19960154891
申请日期
1996.05.27
申请人
EIKO ENG:KK
发明人
TAKAHASHI HIROSHI
分类号
C30B23/08;C23C14/28;H01L21/203;(IPC1-7):C30B23/08
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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