VACUUM APPARATUS, EXHAUST METHOD USING THE SAME AND APPARATUS UTILIZING VACUUM APPARATUS

摘要

PROBLEM TO BE SOLVED: To simply form high vacuum environment within a vacuum container within a short time. SOLUTION: In a vacuum apparatus equipped with a vacuum container holding an interior to vacuum environment, a coating film 4 composed of a photocatalyst material such as TiO2 optically dissociating a water molecule into hydrogen and oxygen molecules is applied to the inner surface of the vacuum container and a mercury lamp 5 capable of emitting light having a wavelength allowing the coating film 4 to optically dissociate a water molecule is provided in the vacuum container.