| 摘要 |
PROBLEM TO BE SOLVED: To raise the cooling effect of an electrode on an ozonizing tube incorporated in a gas chamber and to efficiently generate concd. ozone. SOLUTION: Plural sets of ozonizing tubes each consisting of a grounding electrode 11 formed by lining the inner face of a metallic tube 11a with a glass dielectric 11b and a hollow columnar high-voltage electrode 13 coaxially set in the grounding electrode with a discharge gap 12 in-between are incorporated into the shell 1 of a gas chamber provided with a raw gas inlet and an ozonized gas outlet 8 on both sides. Pure water is supplied to a water jacket 4 provided in the shell to surround the grounding electrode and to the high-voltage electrode to directly cool both electrodes, and a raw gas introduced into the gas chamber and contg. oxygen is ozonized by a silent discharge. Further, the length of the discharge gap is controlled to <=1mm, the resistivity of the pure water to >=200kΩcm, the flow velocity of the pure water supplied to the high-voltage electrode to >=20cm/sec and the thickness of the high-voltage electrode to <=2mm.
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