| 摘要 |
PCT No. PCT/EP94/01011 Sec. 371 Date Oct. 30, 1995 Sec. 102(e) Date Oct. 30, 1995 PCT Filed Mar. 31, 1994 PCT Pub. No. WO94/25760 PCT Pub. Date Nov. 10, 1994A friction vacuum pump (1) is provided with pump sections of different designs, of which the pump section on the inlet side consists of turbomolecular pump stages (14, 15) and a further pump section of Siegbahn stages (16, 17) with spiral grooves (19), whereby the active pumping surfaces of the Siegbahn stages are formed by facing surfaces of an annular rotor disc and an annular stator disc (16, 17). To simplify the production of such a pump, it is proposed that the annular stator discs (16) have spiral grooves (19).
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