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经营范围
发明名称
TURBO-MOLECULAR PUMP
摘要
申请公布号
JPH09317688(A)
申请公布日期
1997.12.09
申请号
JP19960157515
申请日期
1996.05.29
申请人
EBARA CORP
发明人
NOMICHI SHINJI;SHINODA NOBUHARU
分类号
F04C25/02;F04D19/04;(IPC1-7):F04D19/04
主分类号
F04C25/02
代理机构
代理人
主权项
地址
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