METHOD FOR REMOVING PELLICLE FROM PHOTOMASK

摘要

PROBLEM TO BE SOLVED: To easily remove a pellicle stuck to a photomask without damaging or soiling the photomask. SOLUTION: The pellicle 1 is constituted by spreadingly providing a pellicle film 3 at one end face of a pellicle frame 2 and forming an adhesive agent layer 4 at the other end face thereof. At the time of removing the pellicle 1 stuck to the photomask 5 via the adhesive agent layer 4 from the photomask 5, a tongue piece 7 made of resin or rubber which is capable of adhering to the adhesive agent layer 4 is adhered to an outer side of the adhesive agent layer 4. By pulling the tongue piece 7 outside, the adhesive agent layer 4 is stripped from the pellicle frame 2 and from the photomask 5 and is extracted from between them.