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发明名称
INSPECTION APPARATUS FOR PROTRUDING PART OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH09311014(A)
申请公布日期
1997.12.02
申请号
JP19960126861
申请日期
1996.05.22
申请人
NEC CORP
发明人
NAGAO MASAHIKO
分类号
G01B11/00;G01B11/24;G01N21/88;G01N21/956;H01L21/321;H01L21/60;H01L21/66;(IPC1-7):G01B11/00
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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