发明名称 ADHESIVE SHEET FOR REMOVING RESIST AND METHOD FOR REMOVING RESIST
摘要 PROBLEM TO BE SOLVED: To easily and surely remove an unnecessary resist film image on an article with an adhesive sheet independently of the kind and properties of the resist and to prevent the leaving of particles on the article after the removal. SOLUTION: A photosetting adhesive layer contg. N-methylol (meth) acrylamide or its deriv. is formed on a film substrate to obtain the objective adhesive sheet for removing a resist. This adhesive sheet is stuck on an article on which a resist film image exists, the sheet is photoset and the photoset sheet, together with the resist material, is peeled to remove the resist material on the article.
申请公布号 JPH09311464(A) 申请公布日期 1997.12.02
申请号 JP19960125640 申请日期 1996.05.21
申请人 NITTO DENKO CORP 发明人 KIHARA YASUO;CHIKADA YASU;MATSUMURA TAKESHI;HASHIMOTO KOICHI;SEKIDO TATSUYA
分类号 G03F7/42;C09J4/00;C09J7/02;C09J201/00;H01L21/027;(IPC1-7):G03F7/42 主分类号 G03F7/42
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