发明名称 ELECTRODEPOSITION RESIST DRYING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a drying device capable of successfully executing smoothing of electrodeposited resist films electrodeposited on half-finished products, such as lead frames formed by subjecting leaf- and hoop-like sheets to the outside working alone or in an imposition state at the time of subjecting these films to a drying treatment commonly for smoothing of the films. SOLUTION: This device executes the drying of the electrodeposited resist films electrodeposited on the half-finished products, such as lead frames formed by subjecting half- and hoop-like sheets 150 to the outside working alone or in the imposition state while continuously transferring the leaf- and hoop-like sheets 150. In such a case, the device has a draining section 110 which executes draining after the electrodeposition of the electrodeposition resist on the half- finished products, a drying section 121 for drying the electrodeposition resist and cooling section 130 for cooling the dried electrodeposition resist. The draining section 110 drains the sheets by blowing high-pressure air to the front and rear of the sheets; the drying section 120 dries the sheets by blowing hot wind to the front and rear of the sheets and the cooling section 130 cools the sheets by blowing cold wind to the front and rear of the sheets.
申请公布号 JPH09310198(A) 申请公布日期 1997.12.02
申请号 JP19960147818 申请日期 1996.05.20
申请人 DAINIPPON PRINTING CO LTD 发明人 SAKIHAMA NOBUHIRO;MOMOSE TERUHISA
分类号 G03F7/16;C25D7/00;C25D7/12;H01L21/027;H01L23/50 主分类号 G03F7/16
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