| 摘要 |
PROBLEM TO BE SOLVED: To obtain an AlN reflection mirror having high heat resistance and thermal conductivity, excellent adhesion property between the base and a metal layer and good workability of the reflection face and improved productivity. SOLUTION: This AlN reflection mirror consists of an aluminum nitride sintered body base 11, an Al2 N3 layer 12 formed by heating and oxidizing the base body 11, and an SiO2 layer 13 formed on the Al2 O3 layer 12, and a noble metal thick film 14 formed on the SiO2 layer 13. The aluminum nitride sintered body contains preferably 0.1 to 10wt.% of one or two kinds of metal oxides selected from Y2 O3 and CaO. The Al2 O3 layer 12 is preferably formed to 0.2 to 20μm thickness and the SiO2 layer 13 is preferably formed to 0.01 to 10μm thickness. The surface roughness as the center line average roughness of the noble metal thick film 14 is preferably controlled to <0.2μm, and the noble metal thick film 14 preferably contains one or more kinds of metals selected from Au, Ag, Pd and Pt.
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