| 摘要 |
PROBLEM TO BE SOLVED: To prevent a cathode from being oxidized or damaged by sputtering by forming the cathode from a layer of a material having a high electric conductivity extended along its longitudinal direction and a coating of a heat-resistant compound extended along its longitudinal direction to cover the cathode. SOLUTION: A cathode 162 comprises a layer 174 of a material with high electric conductivity extended along its longitudinal direction 162 and a coating of a heat resistant material 184 extended along its longitudinal direction 162 to cover the cathode itself 162. In this case to form the coating, typically, positively charged particles 184 of a heat resistant compound with the diameter of 4.0μm are made to float in a bath of a dielectric liquid such as isopropyl alcohol. Positively charged flit particles 186 are also made to float in the same way. Then, these positively charged particles 184, 186 are attached to the cathode 162 by keeping the cathode at negative potential.
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