THIN-FILM-DEPOSITED SUBSTRATE AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To reduce the consumption of a raw material by more effectively utilizing film parts of a thin-film-deposited substrate having a film on the front and back surfaces of one base. SOLUTION: Desired thin film 22 is deposited on the front and back surfaces of a base 21 which is then sliced in parallel to its surface into a front and back parts to obtain two identical thin-film-deposited substrates. Two thin-film- deposited substrates may be formed by laminating two substrates 34, 35 into a separable base 31, depositing a thin film 32 on the front and back surfaces of the base 31 and separating it at the laminated faces.