发明名称 |
Method of producing a magnetic recording medium |
摘要 |
A method for forming a magnetic recording medium having a chromium underlayer and a magnetic recording layer is described. The method includes sputtering the underlayer and the magnetic layer in a single sputtering chamber from a two-region target having an inner chromium region and an outer magnetic region. Each target region is successively energized for sputter deposition of each layer.
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申请公布号 |
US5693198(A) |
申请公布日期 |
1997.12.02 |
申请号 |
US19950372661 |
申请日期 |
1995.01.13 |
申请人 |
HMT TECHNOLOGY CORPORATION |
发明人 |
LAL, BRIJ BIHARI;SHINOHARA, TADASHI |
分类号 |
C23C14/16;C23C14/56;G11B5/64;G11B5/66;G11B5/73;G11B5/84;(IPC1-7):C23C14/34 |
主分类号 |
C23C14/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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