发明名称 |
Method of making a monolithic thin film resonator lattice filter |
摘要 |
A monolithic thin film resonator, lattice filter including spaced apart strips of a conductive film positioned on a substrate so as to define a first set of I/O terminals, a layer of piezoelectric material positioned on the conductive film, and spaced apart conductive strips of a conductive film positioned on the piezoelectric layer orthogonal to the first strips to form cross-over areas, each defining a thin film resonator and a second set of I/O terminals. A plurality of portions of a dielectric film are positioned on selected cross-over areas to mass load the thin film resonators so as to lower the resonant frequency.
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申请公布号 |
US5692279(A) |
申请公布日期 |
1997.12.02 |
申请号 |
US19950516220 |
申请日期 |
1995.08.17 |
申请人 |
MOTOROLA |
发明人 |
MANG, LUKE;HICKERNELL, FRED S.;KINSMAN, ROBERT G. |
分类号 |
H03H3/02;H03H3/04;H03H9/00;H03H9/17;H03H9/56;(IPC1-7):H01L41/22 |
主分类号 |
H03H3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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