| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a work holder which can prevent oxidation of an entire surface of a work to be fed thereby in a non-contact condition. SOLUTION: The work holder for holding a work W in a non-contact condition comprises a plate-like member 12 made in its center with a fluid ejecting hole 13, a fluid supply pipe 14 connected to the ejecting hole 13 for ejecting an inactive gas from the ejecting hole 13 toward an underside of the plate member 12, thereby causing the plate member to hold the work W in a non- contact condition, and a guide 17 provided at a peripheral part of the plate member 12 for guiding the fluid ejected from the hole 13 and make to flow to the exterior from an upper surface peripheral part of the work into a lower surface side of the work W.</p> |
