| 摘要 |
PROBLEM TO BE SOLVED: To provide a perpendicular magnetization film suitable for a magneto- optical recording medium in order to have a good rectangular characteristic, a high coercive force and a large polar magnetic Kerr rotation angle. SOLUTION: A seed layer made of a stand-alone metal or an alloy with a thickness of 100Åor less is formed, and then a buffer layer made of a face centered cubic metal with a thickness of 5μm or less (excluding 0) at a substrate temperature of 100-100 deg.C. Then, a layer made of a composition expressed by a general formula, (Fea Co1-a )100-x-y Ptx My , where the by-product M is one or two types of elements selected from Be, B, C, Mg, Al, Si, Ti, V, Cr, Ni, Mn, Cu, Ge, Zr, Nb, Mo, Ru, Rh, Pd, Ag, In, Sn, Sb, rare earth element, Hf, Ta, W, Re, OS, Ir, Au and Bi, and where the composition ratio a and the atomic ratios x, y are expressed by 0<=a<=1.0, 45<=x<=75, and 0<=7<=15, and a small quantity of impurity with a thickness ofÅor less (excluding 0) is stacked on the buffer layer at a substrate temperature of 400-700 deg.C. Thus, a perpendicular magnetization film is formed.
|
