发明名称 ANALYTICAL METHOD FOR THIN-FILM STRUCTURE AND ITS DEVICE
摘要 PROBLEM TO BE SOLVED: To identify a position coordinator of a fluorescent X-ray radiation atom contained in a thin film sample which is not fixed on a base board and analyze the structure of the thin-film sample, by embedding a monochromatic X-ray source in the thin film sample and detecting an angle distribution of the X-ray emitted by irradiation of an excitation light. SOLUTION: A sample 6 is irradiated with X-ray obtained by making synchrotron radiation X-ray monochromatic with a Si (111) crystal spectroscope 4 as an excitation light 5. In the sample 6, zinc is arranged inside an organic molecular film in a single atom layer. The intensity of Kαfluorescent X-rays 7 of the zinc radiated from the sample 6 is counted by a germanium semiconductor detector 6. The Kα-ray of the zinc is selected and counted by the detector 8, so that the background caused by an elastic scattering of an incident X-ray is reduced. To measure the angle distribution, a slit plate 9 is arranged in a position at a prescribed distance from the sample of the front face of the detector 8, so that the X-ray intensity is counted, while the slit plate 9 is scanned vertically by a straight advanceming stage.
申请公布号 JPH09304308(A) 申请公布日期 1997.11.28
申请号 JP19960118597 申请日期 1996.05.14
申请人 HITACHI LTD 发明人 SUZUKI YOSHIO;SASAKI YUJI;TOMIOKA YASUSHI
分类号 G01N23/223;(IPC1-7):G01N23/223 主分类号 G01N23/223
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