| 摘要 |
PROBLEM TO BE SOLVED: To enable the measurement of the angle of indination of an object simultaneously with the distance to the object with the measurement accuracy from a reference plane to the object unaffected by the indination of the object to the reference plane. SOLUTION: A reflecting mirror 4 is fixed on an object 3. Laser light 6 is irradiated toward the reflecting mirror 3 from a laser light source 1 arranged on a reference plane 5, and the arrival position of the reflected light 7 is measured by a two-dimentional position sensing element 2 arranged adjacent to the laser light source 1. Next to this, the 2-D position sensing element 2 is moved in a vertical direction by a predetermined distanceΔto the reference plane 5, and the arrival position of the reflected light 7 is measured again. The distance L and the angle of inclinationαx andαy are calculated on the basis of the measured values (Xa, Ya;Xb, Yb) of the arrival position of the reflected light 7 after and before the movement.
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