| 摘要 |
<p>PROBLEM TO BE SOLVED: To adjust room humidity or room temperature fitting to the reduction of room concentration of gaseous contamination components while eliminating the use of other devices such as a humidity adjustor and an air temperature adjustor. SOLUTION: Room air A1 in an object room 1 is guided to a cleaner 2 which air is brought into contact with clean water W in the cleaner 2 to remove gaseous contamination components with the absorption of the clean water W, and air A2 after cleaned is returned to the object chamber 1, whereby concentration of the gaseous contamination components in the object room 1 is reduced. In this case, the clean water W used for the cleaning in the cleaner 2 is cooled or heated with water temperature adjustment means 13 for its temperature adjustment. With the water temperature adjustment, room humidity xa or room temperature ta in the object room l is adjusted together with the reduction of the room concentration of the gaseous contaminated components by the cleaning.</p> |
