发明名称 WAFER DIVIDING SYSTEM
摘要 <p>PROBLEM TO BE SOLVED: To provide a wafer dividing system which recognizes the addresses of streets of a wafer to be cut into two or more blocks so that the block can be specified according to the addresses thereafter and mapping data can be effectively utilized. SOLUTION: The system for dividing a wafer 1 having semiconductor chips 2 sectioned by streets into two or more blocks recognizes the addresses of streets to be cut, makes block data for specifying the blocks according to the addresses, and registers the data in a CPU. The block data contains mapping data utilizable for picking up only required semiconductor chip 2 in a chip pick up step after dicing the block into the semiconductor chips.</p>
申请公布号 JPH09306873(A) 申请公布日期 1997.11.28
申请号 JP19960121536 申请日期 1996.05.16
申请人 DISCO ABRASIVE SYST LTD;TEXAS INSTR JAPAN LTD 发明人 OKAMOTO TETSUJI;SEKIYA KAZUMA;NEGISHI KATSUHARU
分类号 H01L21/301;H01L21/02;(IPC1-7):H01L21/301 主分类号 H01L21/301
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