发明名称 SUBSTRATE SUCTION APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To avoid the vacuum pressure deterioration influence on a glass plate difficult of vacuum suction by once switching off valve means to stop feeding of the vacuum pressure to a suction part if specified value of the vacuum pressure to this part is not reached. SOLUTION: A controller 4 once switches off an electromagnetic valve 2 to stop feeding of the vacuum pressure to a suction part 1 and shuts off this part 1 from a main pipe line 10 to wait for specified time, if specified value of the vacuum pressure to this part is not reached after specified time lapsed from the start of a sucking operation. As the result, the main line 10 recovers the vacuum pressure, the controller switches on the valve 2 to try the sucking operation, thereby obtaining a higher suction pressure enough to suck and hold a glass plate 20 being forced to warp. Thus it is possible to avoid the vacuum pressure deterioration influence on the glass plate difficult of vacuum suction.</p>
申请公布号 JPH09306973(A) 申请公布日期 1997.11.28
申请号 JP19960124668 申请日期 1996.05.20
申请人 NIKON CORP 发明人 KOBAYASHI NORIO;KATSUME TOSHIHIRO
分类号 H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/677
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