| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a device, which can improve the uniformity of the distribution of temperature rise in the surface of a board, by setting a sealed area, which is to be formed by a base and a soft film, larger by the predetermined width than a board to be retained thereon. SOLUTION: Plane dimension of a sealed area 16, namely, plane dimension of a soft film 12 is set larger by 5mm than that of a board 2 in the periphery of the board 2. In the case of a square board 2, vertical and horizontal dimension of the sealed area 16 and the soft film 12 are formed larger by 5mm or more than that of the board 2, and in the case of a circular board 2, the sealed area 16 and the soft film 12 are formed into a circle, and radius thereof is set larger by 5mm or more than that of the board 2. With this structure, a part of the whole of a peripheral edge area 12b of the soft film 12 stretched over the sealed area 16 is positioned outside of the board 2. Since the peripheral edge area 12b is formed into a recessed surface or a steep projecting surface, the peripheral edge area 12b is hard to contact with the board 2. Consequently, plane dimension of the soft film 12 is desirably set larger by 20-30mm than that of the board 2 in the periphery of the board 2.</p> |
